Effect of working environment on stiction mechanisms in electrostatic RF-MEMS switches
U. Zaghloul, G. Papaioannou, B. Bhushan, P. Pons , F. Coccetti, and R. Plana
Effect of working environment on stiction mechanisms in electrostatic RF-MEMS switches
U. Zaghloul1,2,3, G. Papaioannou1,2, 4, B. Bhushan3, P. Pons1,2 , F. Coccetti1,2,5, and R. Plana1,2 1 CNRS; LAAS; 7 avenue du colonel Roche, F-31077 Toulouse, France 2 Université de Toulouse; UPS, INSA, INP, ISAE ; LAAS ; F-31077 Toulouse, France 3 NLBB Laboratory, The Ohio State University, Columbus, OH 43210,