EuMIC: Nanoscale Characterization of Different Stiction Mechanisms in Electrostatic RF-MEMS Switches
U. Zaghloul, B. Bhushan, Patrick Pons, G. Papaioannou, F. Coccetti, R. Plana
Proceedings of the 6th European Microwave Integrated Circuits Conference
Nanoscale characterization of different stiction mechanisms in electrostatic RF-MEMS switches
U. Zaghloul1,2,3, B. Bhushan3, P. Pons 1,2 ,G. Papaioannou 1,2, 4, F. Coccetti 1,2,5, and R. Plana 1,2
1 2
CNRS; LAAS; 7 avenue du colonel Roche, F-31077 Toulouse, France, ppons-laas.fr Université de Toulouse; UPS, INSA, INP, ISAE