EuMC: Electrical Characterization of Millimeter-Wave Interconnects on Low-k and Low-Loss Oxides for Advanced 3D Silicon Interposers
B. Reig, P. Renaux, Henri Sibuet, D. Mercier, C. Mounet, Christine Ferrandon, Sylvain Joblot, Pierre Bar, Perceval Coudrain, Jean-Francois Carpentier, T. Lacrevaz, B. Flechet
Proceedings of the 41st European Microwave Conference
Electrical Characterization of Millimeter-Wave Interconnects on Low-k and Low-loss Oxides for Advanced 3D Silicon Interposers
B. Reig#1, P. Renaux#, H. Sibuet#, D. Mercier#, C. Mounet#, C. Ferrandon#, S. Joblot*, P. Bar*, P. Coudrain*, J.F. Carpentier*, T. Lacrevaz§, B. Flechet§
#
CEA, LETI,MINATEC Campus, F-38054 Grenoble, France
1
Bruno.re