AMICOM Summer School 2009 26.06.2009, Toulouse, France System implementation of RF-MEMS Dr. Volker Ziegler EADS Innovation Works Germany Dept: Sensors, Electronics and System Integration 81663 Munich eMail: volker.ziegler-eads.net Traditional devices for microwave circuits are ... Schottky and PIN diodes based on silicon or GaAs for switching applications Varactor diodes based on silicon o

Technology and Materials 5th Summer School on RF-MEMS T. Lisec Fraunhofer Institute for Silicon Technology Fraunhoferstr. 1, 25524 Itzehoe, Germany 22nd-26th June 2009, LAAS-CRNS Toulouse Substrate materials · RF-MEMS are relatively substrate independent, since the fabrication temperatures can be very low. But the majority of devices described thus far are fabricated on high-resistivity Silico

Introduction to RF MEMS Introduction to RF MEMS Presented by Stepan Lucyszyn Dr Stepan Lucyszyn 22nd June 2009 Introduction to RF MEMS Abstract Radio frequency microelectromechanical systems (RF MEMS) are heralded a technology fit for the 21st centaury, offering unsurpassed RF performance over more conventional solid-state electronic devices. In recent years, this technology has seen a rapid

RF MEMS Switches P. Blondy XLIM UMR CNRS 6172 Faculté des Sciences ­ Université de Limoges FRANCE pblondy-xlim.fr Outline of the course ·! RF-MEMS today ·! Switches ·! Emerging applications Section 1 RF-MEMS TODAY What are RF-MEMS? ·! Purpose: Use mechanics to achieve electrical function: high potential to introduce tunability or intelligence in RF sub-systems ·! Switch and varactors ·! In

MEMS C PACKAGING & ASSEMBLY Tauno Vähä-Heikkilä (VTT) and Harrie Tilmans (IMEC) 5th Intl Summer School on RF-MEMS and RF-MST CNRS-LAAS (Toulouse, France) June 24, 2009; 11h00-12h30 1 Overview (RF-)MEMS packaging: Hierarchy/Terminology Requirements (0-level) Packaging concepts (0-level) Packaging Technology Examples/Problems/Performance Conclusions/Statements H. Tilmans (IMEC)/T..Vaha-Heikkil

NON Silicon RF MEMS and IC processing C. Lanzieri, A. Coppa, F. Crispoldi, S. Lavanga, A. Nanni, A. Pantellini GaAs/GaN Foundry Selex-Sistemi Integrati clanzieri-selex-si.com 22/06/09 Piè di pagina - Arial 12 pt. Integrated MEMS for RF application In microwave and millimetre-wave ICs, low-loss/low power dissipation switching of RF signals is required in many applications: i.e. impedance match