EuMC: New Fabrication Process to Manufacture RF-MEMS and HEMT on GaN/Si Substrate
F. Crispoldi, Alessio Pantellini, S. Lavanga, Antonio Nanni, Paolo Romanini, L. Rizzi, P. Farinelli, Claudio Lanzieri
Proceedings of the 39th European Microwave Conference
New Fabrication Process to Manufacture RF-MEMS and HEMT on GaN/Si Substrate
F.Crispoldi#1, A. Pantellini #2, S. Lavanga#2, A. Nanni#2, P. Romanini#2, L. Rizzi#1 , P. Farinelli#3, and C. Lanzieri#2
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Consorzio Optel Via Tagliamento 45, 00198 Rome, Italy SELEX Sistemi Integrati SpA, Via Tiburtina Km.12,400, Rome 00131, Italy
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Universita