Characterization of porous ULK SiOCH and impact on signal propagation for on-chip interconnects of the 45 nm node
Michel Gallitre1, 2, Benjamin Blampey', Bernard Fléchet', Alexis Farcy2, Vincent Arnal2, Cédric Bermond1, Thierry Lacrevaz1 and Joaquin Torres'
Characterization of porous ULK SiOCH and impact on signal propagation for on-chip interconnects of the 45 nm node
Michel Gallitre1, 2 , Benjamin Blampey', Bernard Fléchet', Alexis Farcy2 , Vincent Arnal2, Cédric Bermond1, Thierry Lacrevaz1 and Joaquin Torres'
Abstract -- As the dimensions scale down aggressively into the nanometer regime at each new technology node, interconnects parasitics, which