EuMC: RF-MEMS Switch and Phase Shifter Optimized for W-Band
A. Stehle, G. Georgiev, Volker Ziegler, Bernhard Schoenlinner, Ulrich Prechtel, H. Seidel, U. Schmid
Proceedings of the 38th European Microwave Conference
RF-MEMS Switch and Phase Shifter Optimized for W-Band
A. Stehle#1, G. Georgiev#+, V. Ziegler#, B. Schoenlinner#, U. Prechtel#, H. Seidel*, U. Schmid*
#
EADS Innovation Works, Dept: Sensors, Electronics and System Integration, 81663 Munich, Germany 1
armin.stehle-eads.net
*
Saarland University, Chair of Micromechanics, Microfluidics/Microact