Simplified RF-MEMS Switches Using Implanted Conductors and Thermal Oxide
Christian Siegel, Volker Ziegler, Bernhard Schonlinner, Ulrich Prechtel, Hermann Schumacher
Proceedings of the 36th European Microwave Conference
Simplified RF-MEMS Switches Using Implanted Conductors and Thermal Oxide
Christian Siegel1, Volker Ziegler1, Bernhard Schönlinner1, Ulrich Prechtel1 and Hermann Schumacher2
2
EADS Germany, Corporate Research Centre, Munich, D81663, Germany, University of Ulm, Dept. of Electron Devices and Circuits, Albert Einstein Allee 45, Ulm, D89081,
II. T