EuMC: Characterization of Low-Temperature Ultrananocrystalline Diamond RF MEMS Resonators
Sergio P. Pacheco, Peter Zurcher, Steven R. Young, Don Weston, William J. Dauksher, Orlando Auciello, John A. Carlisle, Neil Kane, James P. Birrell
Characterization of Low-Temperature UltrananocrystallineTM Diamond RF MEMS Resonators
Sergio P. Pacheco 1 , Peter Zurcher 1 , Steven R. Young 2 , Don Weston 2 , William J. Dauksher 2 , Orlando Auciello 3 , John A. Carlisle 3 , Neil Kane 4 , and James P. Birrell
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Freescale Semiconductor, Inc. - Technology Solutions Organization, Tempe, AZ, 85284 USA 2 Motorola, Inc. - Motorola Labs, Tempe, AZ,