EuMC: An Original Methodology to Assess Fatigue Behavior in RF MEMS Devices
O. Millet, P. Bertrand, B. Legrand, D. Collard, L. Buchaillot
An Original Methodology to Assess Fatigue Behavior in RF MEMS Devices
O. Millet1), P. Bertrand2), B. Legrand2), D. Collard2,3), L. Buchaillot2)
DELFMEMS IEMN, Avenue Poincaré, Cité Scientifique, 59652, Villeneuve d'Ascq, France 2) IEMN, Silicon Microsystems Group Institute of Electronic, Microelectronic and Nanotechnologies, UMR CNRS 8520 Dept. ISEN, Avenue Poincaré, Cité Scientifique, 59652, Vill