EuMC: Nano-Probing Station Incorporating MEMS Probes for 1D Device RF On-Wafer Characterization
K. Daffe, J. Marzouk, A. El Fellahi, T. Xu, C. Boyaval, S. Eliet, B. Grandidier, S. Arscott, G . Dambrine, K. Haddadi
Proceedings of the 47th European Microwave Conference
Nano-Probing Station incorporating MEMS probes for 1D Device RF On-Wafer Characterization
K. Daffe, J. Marzouk, A. El Fellahi, T. Xu, C. Boyaval, S. Eliet, B. Grandidier, S. Arscott, G. Dambrine and K. Haddadi
Institute of Electronics, Microelectronics and Nanotechnology (IEMN - UMR CNRS 8520) University of Lille Avenue Poincaré CS 60069 59