EuMC: Material Characterization Using a Compact W-Band Ellipsometer
Mathias Klenner, Christian Zech, Axel Hulsmann, Jutta Kuhn, Michael Schlechtweg, Oliver Ambacher
Proceedings of the 46th European Microwave Conference
Material Characterization using a compact W-Band Ellipsometer
Mathias Klenner , Christian Zech , Axel H¨ lsmann , Jutta K¨ hn , u u Michael Schlechtweg and Oliver Ambacher
Fraunhofer Department
Institute for Applied Solid State Physics (IAF), Freiburg im Breisgau, Germany of Microsystems Engineering - IMTEK, University of Freiburg, Freiburg