EuMC: Thin Film Wafer Level Encapsulated RF-MEMS Switch for D-Band Applications
S. Tolunay Wipf, A. Goritz, M. Wietstruck, C. Wipf, B. Tillack, Andreas Mai, Mehmet Kaynak
Proceedings of the 46th European Microwave Conference
Thin Film Wafer Level Encapsulated RF-MEMS Switch for D-Band Applications
S. Tolunay Wipf1, A. Göritz1, M. Wietstruck1, C. Wipf1, B. Tillack1, 2, A. Mai1, and M. Kaynak1, 3
2
IHP, Im Technologiepark 25, 15236 Frankfurt (Oder), Germany Technische Universität Berlin, HFT4, Einsteinufer 25, 10587, Berlin, Germany 3 Sabanci University, Orta Mahal