EuMC: Reliability of Nanocrystalline Diamond MEMS Capacitive Switches
L. Michalas, S. Saada, M. Koutsoureli, C. Mer, A. Leuliet, P. Martins, S. Bansropun, G. Papaioannou, P. Bergonzo, A. Ziaei
Proceedings of the 43rd European Microwave Conference
Reliability of Nanocrystalline Diamond MEMS Capacitive Switches
L. Michalas1,a, S.Saada2,b, M. Koutsoureli1, C. Mer2, A. Leuliet3,c, P. Martins3, S. Bansropun3, G. Papaioannou1, P. Bergonzo2, A. Ziaei3
1
Solid State Section, Physics Department University of Athens, Athens, Greece a lmichal-phys.uoa.gr
2
Diamond Sensors Lab., CEA-LIST F-91191