Capacitive and ohmic RF NEMS switches based on vertical carbon nanotubes
A. Ziaei, M. Charles, M. Le Baillif, S. Xavier, A. Caillard, C.S. Cojocaru
The objective is to demonstrate a reproducible carbon nanotube (CNT)-based technology for radio frequency (RF) switch working in the range of 40?60 GHz and fulfilling the specifications: low losses, high isolation, and an operating voltage below 30 V. The first processed component had an operating voltage of 14 V for an ohmic contact in a Nano-Electro Mechanical System (NEMS) tweezer design. This