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4th AMICOM Summer School- RF NEMS RF NEMS NEMS= NanoElectroMechanicalSystems= Nanosized mechanical elements or systems having the MECHANICAL resonance frequency in the frequency range GHz-THz RF NEMS = devices which exploit the coupling and/ or interaction between electromagnetic fields at GHzTHz range and NEMS oscillating mechanically in the same frequency range Prof Mircea Dragoman mircead- im

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2007 2007 MEMS Technologies for Reconfigurable Antennas Laurent DUSSOPT laurent.dussopt-cea.fr - www.leti.fr © CEA 2007. Tous droits réservés. Toute reproduction totale ou partielle sur quelque support que ce soit ou utilisation du contenu de ce document est interdite sans l'autorisation écrite préalable du CEA All rights reserved. Any reproduction in whole or in part on any medium or use of th