NON SILICON MEMS & IC PROCESSING George Konstantinidis Microelectronics Research Group (MRG) Institute of Electronic Structure & Laser (IESL) Foundation for Research & Technology Hellas (FORTH) 4th AMICOM SUMMER SCHOOL 2nd- 6th JULY 2007 LAAS-CNRS TOULOUSE FORTH Process flow general issues · Substrate (GaAs, Si, Sapphire) · Epitaxial material (MBE, MOCVD) FABRICATION · Photolithography · Meta

Tutorial on Electromagnetic design and Modeling with HFSS F. Coccetti - LAAS-CNRS Example ­ RF-MEMS Switch This example is intended to show you how to create, simulate, and analyze a RF-MEMS switch on silicon substrate using the Ansoft HFSS Design Environment. 500 5 104 73 106 3D view of the Switch 88 120 200 40 184 100 HFSS Model (half structure with simmetry plane) Switch layout dimen

4th AMICOM Summer School LAASLAAS-CNRS T l Toulouse ­ 2 - 6 J l 2007 July Tutorial on Electromagnetic design and Modeling with HFSS Fabio Coccetti LAAS-CNRS 4th AMICOM Summer School ­ LAAS-CNRS Toulouse ­ 2 - 6 July 2007 Tutorial on Electromagnetic design and Modeling with HFSS Why HFSS ? Ansoft HFSS (High Frequency Structure Simulator) is an arbitrary 3D volumetric Full-Wave filed solver in f

4th AMICOM Summer School LAAS-CNRS Toulouse ­ 2 - 6 July 2007 Tutorial on multiphysic's modeling with COMSOL David Peyrou dpeyrou-laas.fr LAAS-CNRS 4th AMICOM Summer School ­ LAAS-CNRS Toulouse ­ 2 - 6 July 2007 Tutorial on multiphysic's modeling with COMSOL - 1 / 45 OUTLINE What is COMSOL Multiphysic? Why using COMSOL for mems applications? How to use it? What else? FEM basics (keypoints) Ge

Analogue Electronics and RF MEMS Christos Papavassiliou Imperial College London Outline · · · · · · · · A brief history of analogue electronics A brief history of integrated electronics Overview of electronic analysis and design Current state of the art and short term outlook MEMS amplifying devices Delay lines Passives Summary 4th AMICOM Summer School 2 Toulouse, 3/7/2007 Analogue Electronics

Summer school: design of a shunt capacitor MEMS device 1: Create your own project In the main menu, go to File / New project and enter the name of your project. New, ADS open a schematic window, or open your schematic windows by clicking the icon . Figure 1: Schematic windows in ADS This window is your environment to design the MEMS device. You will use the components of the Microstrip library to

4th AMICOM Summer School LAASLAAS-CNRS T l Toulouse ­ 2 - 6 J l 2007 July Tutorial on Electric design and Modeling with ADS Antony Coustou y acoustou-laas.fr LAAS-CNRS 4th AMICOM Summer School ­ LAAS-CNRS Toulouse ­ 2 - 6 July 2007 Tutorial on Electromagnetic design and Modeling with ADS 1 OUTLINE ADS: Why? What else? How to use it: Get Started Examples E l 4th AMICOM Summer School ­ LAAS-C

W-band low-noise amplifiers Mikko Varonen', Mikko Kärkkäinen', Mikko Kantanen2 , Mikko Laaninen3, Timo Karttaavi2 , Rainer Weber'', Arnulf Leuther4, Matthias Seelmann-Eggebert4, Tapani Narhi5 , Janne Lahtinen6 and Kari A. I. Halonen' Abstract -- We report low noise amplifiers for a 94-GHz cloud profiling radar. Four amplifiers were designed using coplanar waveguides and they were manufactured with

Using an electrically large loop antenna with Uniform current distribution as RFID ultra high frequency near field reader antenna Christian Stockreiter', Franz Amtmann2 , Anton Salfelner3 and Christian Scherabon4 Abstract -- The aim of this work was to design a simple ultra high frequency reader antenna with well defined electromagnetic field distribution enabling applications like item level tagg

UHF RFID miniature tag based on metamaterial structures J. Dacuna and R. Pous Abstract -- In this paper a new radiating structure is introduced, inspired by the Split-Ring Resonator (SRR) geometry used in some metamaterial structures. It has the advantage of being easily miniaturized and fabricated in planar substrates. The SRR is analyzed by using a novel transmission line model in order to de