A low contact-resistance winged-bridge RF-MEMS series switch for wide-band applications
Paola Farinelli', Benno Margesin2, Flavio Giacomozzi2, Giovanni Mannocchi3, Simone Catoni4, Romolo Marcelli4, Paolo Mezzanotte, Larissa Vietzorreck5, Francesco Vitulli3, Roberto Sorrentino and Francois Deborgies6
A low contact-resistance winged-bridge RF-MEMS series switch for wide-band applications
Paola Farinelli', Benno Margesin2, Flavio Giacomozzi2 , Giovanni Mannocchi3, Simone Catoni4, Romolo Marcelli4, Paolo Mezzanotte, Larissa Vietzorreck5, Francesco Vitulli3 , Roberto Sorrentino and Francois Deborgies6
Abstract -- A MEMS ohmic series switch with a winged bridge has been designed, fabricated and tes