EuMC: Totally Free-Flexible Membrane for Low Voltage MEMS Metal Contact Switch
Karim Segueni, Loic Le Garrec, Anne-Sophie Rollier, Renaud Robin, Salim Touati, Alexandre Kanciurzewski, Lionel Buchaillot, Olivier Millet
Proceedings of the 37th European Microwave Conference
Totally free-flexible Membrane for Low Voltage MEMS Metal Contact Switch
Karim Segueni# 1, Loic Le Garrec#, Anne-Sophie Rollier#, Renaud Robin#*, Salim Touati#, Alexandre Kanciurzewski#, Lionel Buchaillot* 2, Olivier Millet# 3
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DelfMEMS SAS, 5 rue Héloïse, Haute Borne, 59650 Villeneuve d'Ascq France
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karim.segueni-delfmems.com olivier.