Newly Developed High Q FBAR with Mesa-Shaped Membrane
Hae-Seok Park, Jooho Lee, Jeashik Shin, Jongoh Kwon, Sangchul Sul, Duck-Hwan Kim, Kwang-Jae Shin, Myeong-Kwon Gu, Insang Song
Proceedings of the 36th European Microwave Conference
Newly Developed High Q FBAR with Mesa-Shaped Membrane
Hae-Seok Park, Jooho Lee, Jeashik Shin, Jongoh Kwon, Sangchul Sul, Duck-hwan Kim, Kwang-Jae Shin*, Myeong-Kwon Gu* and Insang Song Samsung Advanced Institute of Technology, Suwon-Si, Gyounggi-Do, P.O. Box 111, Korea * MEMS Solution, Yongin-Si, Gyounggi-Do, P.O. Box 25, Korea
ABSTRACT -- In