Low Noise Metamorphic HEMTs with Reflowed Submicron T-Gate
Y. C. Lien, E. Y. Chang, H. C. Chang, L. H. Chu1, K. W. Huang, H. M. Lee, C. S. Lee, S. H. Chen, P. T. Shen
Low Noise Metamorphic HEMTs with Reflowed Submicron T-Gate
Y. C. Lien1, E. Y. Chang1*, H. C. Chang1, L. H. Chu1, K. W. Huang2, H. M. Lee1, C. S. Lee1, S. H. Chen1, P. T. Shen1
National Chiao Tung University, Department of Materials Science and Engineering, 1001 Ta-Hsueh Road, Hsinchu 300, Taiwan, R.O.C. 2 National Nano Device Laboratories, 1001-1 Ta-Hsueh Road, Hsinchu 30050, Taiwan, R.O.C. * Phon