A Micromachined Tunable Cavity Resonator
D. Mercier, M. Chatras, J.C. Orlianges, C. Champeaux, A. Catherinot, P. Blondy, D. Cros, J. Papapolymerou
A Micromachined Tunable Cavity Resonator
D. Mercier1, M. Chatras1, J. C. Orlianges2, C. Champeaux2, A. Catherinot2, P. Blondy1, D. Cros1 and J. Papapolymerou3
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IRCOM, 2SPCTS, Limoges cedex, 123 av. Albert Thomas 87060 , France. 3 Georgia Institute of Technology, Atlanta, Georgia, 30332-0250, USA. length of CPW line behaves like a low Q resonator that induces a perturbation in the high Q cavity a