Novel RF-MEMS capacitive switching structures
X. Rottenberg, H. Jansen, P. Fiorini, W. De Raedt, H.A.C. Tilmans
Novel RF-MEMS capacitive switching structures
X. Rottenberg, H. Jansen*, P. Fiorini, W. De Raedt and H. A. C. Tilmans. * IMEC v.z.w., Division MCP, Kapeldreef 75, B3001 Leuven, Belgium, xrottenb-imec.be Twente Univ., MESA+ Res. Ins., Elec. Eng. Dpt., PO Box 217, 7500 AE Enschede, Netherlands
This paper reports on novel RF-MEMS capacitive switching devices implementing an electrically floating met