High-Q Inductors for Realization of Low Insertion Loss Baluns and Couplers Integrated in Thin Film Multilayer MCM-D Technology for Wireless Applications
P. Pieters, G. Carchon, K. Vaesen, S. Brebels, W. De Raedt, E. Beyne, R.P. Mertens
High-Q Inductors for Realization of Low Insertion Loss Baluns and Couplers Integrated in Thi n F ilm Multilayer MCM-D Technology for Wireless Applicat ions
P. Pieters*, G. Carchon, K. Vaesen, S. Brebels, W. De Raedt, E. Beyne, R.P. Mertens
IMEC, HDIP-group, Kapeldreef 75, 3001 Leuven, Belgium Tel : +3 2 16 281261, Fax : +32 1 6 281501, beyne-imec.be
Abstract - This paper presents spiral inductors