EuMC: Engineered High Resistivity Silicon Substrates in IPD Technology Used for Miniaturized Sub-6GHz Filters
Atte Haapalinna, Heikki Holmberg, Arto Hujanen, Katja Parkkinen, Pekka Rantakari, Jan Saijets, Tauno Vaha-Heikkila
Proceedings of the 51st European Microwave Conference
Engineered High Resistivity Silicon Substrates in IPD
Technology Used for Miniaturized sub-6 GHz Filters
Atte Haapalinna#1, Heikki Holmberg#, Arto Hujanen$2, Katja Parkkinen#, Pekka Rantakari$, Jan Saijets$,
Tauno Vähä-Heikkilä$
#
Okmetic Oy, P.O. Box 44, FI-01301 Vantaa, Finland
$
VTT Technical Research Center of Finland, 02044 Espoo, Finland