EuMIC: Analysis of a Thin Film Dielectric Characterization Method Based on the Impedance Difference of Two MIM Capacitors
A. Niembro-Martin, D. Mercier, H. Sibuet, C. Dieppedale, C. Baret, C. Bonnard, C. Billard, P. Gardes, P. Poveda
Proceedings of the 12th European Microwave Integrated Circuits Conference
Analysis of a thin film dielectric characterization method based on the impedance difference of two MIM capacitors
A. Niembro-Martin, D. Mercier, H. Sibuet, C. Dieppedale, C. Baret, C. Bonnard, C. Billard
Univ. Grenoble Alpes, 38000, France, CEA, LETI, MINATEC Campus, 17 rue des Martyrs, 38054, Grenoble, France
Abstract--Th