EuMIC: Transfer of AlGaN/GaN RF-Devices onto Diamond Substrates via van der Waals Bonding
Thomas Gerrer, Volker Cimalla, Patrick Waltereit, Stefan Muller, Fouad Benkelifa, Thomas Maier, Heiko Czap, Christoph Nebel, Rudiger Quay
Proceedings of the 12th European Microwave Integrated Circuits Conference
Transfer of AlGaN/GaN RF-devices onto diamond substrates via van der Waals bonding
Thomas Gerrer , Volker Cimalla , Patrick Waltereit, Stefan M¨ ller, Fouad Benkelifa, u Thomas Maier, Heiko Czap, Christoph Nebel and R¨ diger Quay u
Fraunhofer Institute for Applied Solid State Physics Tullastr. 72, 79108 Freiburg, Germany t