EuMC: Silicon-Micromachined Waveguide Systems as a Packaging Solution for Sub-THz and THz Active Circuits
Vladimir Ermolov, Antti Lamminen, Mikko Varonen, Henri Ailas, Markku Lahti, Henrik Forsten, Mikko Kaunisto, Mikko Kantanen, Dristy Parveg, Pekka Pursula
Proceedings of the 54th European Microwave Conference
Silicon-Micromachined Waveguide Systems as a
Packaging Solution for sub -THz and THz Active
Circuits
Vladimir Ermolov, Antti Lamminen, Mikko Varonen, Henri Ailas, Markku Lahti, Henrik Forstén, Mikko Kaunisto,
Mikko Kantanen, Dristy Parveg, Pekka Pursula
VTT Technical Research Centre of Finland, Finland
{firstname.surname}-vtt.fi
low yield. Thu