RF MEMS ohmic switches for matrix configurations
Giorgio De Angelis, Andrea Lucibello, Emanuela Proietti, Romolo Marcelli, Giancarlo Bartolucci, Federico Casini, Paola Farinelli, Giovanni Mannocchi, Sergio Di Nardo, Daniele Pochesci, Benno Margesin, Flavio Giacomozzi, Olivier Vendier, Taeyoung Kim, Larissa Vietzorreck
Two different topologies of radio frequency micro-electro-mechanical system (RF MEMS) series ohmic switches (cantilever and clamped?clamped beams) in coplanar waveguide (CPW) configuration have been characterized by means of DC, environmental, and RF measurements. In particular, on-wafer checks have been followed by RF test after vibration, thermal shocks, and temperature cycles. The devices have