Large Fractional Bandwidth BAW Filter M. Chatras1, L. Catherinot1, S. Bila1, P. Blondy, D. Cros1, T. Baron2, S. Ballandras2, P. Monfraix3, L. Estagerie4 1 University of Limoges, XLIM-CNRS, 123 Av Albert Thomas, 87060 LIMOGES, FRANCE, +33 587 50 67 34 2 University of Besançon, FEMTO-ST, 32 Av de l'Observatoire, 25044 BESANCON, +33 381 40 28 34 3 Thales Alenia Space, 26 Av JF Champollion, 31037 T

New Directions in MEMS for Wireless Harsh-Environment Sensors D. Peroulis In this talk we will present some important challenges in MEMS and new methods for addressing them. We seek solutions at the fabrication technology, device, and subsystem levels. As an example, we will present inherently-reliable harsh-environment MEMS sensors for the health monitoring of aircraft engines. These sensors have

1 A highly-repeatable, broadband 180º phase switch for integrated MEMS processes Marco Antonio Llamas1, David Girbau2, Miquel Ribó3, Lluís Pradell4, Flavio Giacomozzi5, Sabrina Colpo5, Fabio Coccetti6,7, Stéphane Aouba6,7 2 1 Baolab Microsystems, Ctra. N-150, Km 14.5, 08220 Terrassa, Spain Department of Electronic, Electrical and Automatic Control Engineering, Universitat Rovira i Virgili, 43007

Floating electrode microelectromechanical system capacitive switches: A different actuation mechanism E. Papandreou1, S. Colpo2, M. Koutsoureli1, F. Giacomozzi2, G. Papaioannou1 and B. Margesin2 1 National Kapodistrian University of Athens, Solid State Physics Section of Physics Dpt., Panepistimiopolis Zografos, Athens 15784, Greece 2 FBK- IRST, Via Sommarive 18, 38050 Povo Trento, Italy Abst

Capacitance Tuning Behavior of a BiCMOS Embedded RF-MEMS Switch M. Kaynak1, M. Wietstruck1, W. Zhang1, R. Scholz1 and B. Tillack1,2 IHP, Im Technologiepark 25, 15236 Frankfurt (Oder), Germany 2 Technische Universität Berlin, Berlin, Germany Tel: (+49) 335 5625 707, Fax: (+49) 335 5625 327, Email: kaynak-ihp-microelectronics.com H H H H 1 Abstract -- The capacitance tuning behavior of a BiCMOS em

Design of ohmic miniature MEMS components for fast reconfiguration Aurélie Verger1, Arnaud Pothier1, Cyril Guines1, Aurelian Crunteanu1, Pierre Blondy1, JeanChristophe Orlianges2, Jérémie Dhennin3, Frédéric Courtade4, Olivier Vendier5 2 XLIM UMR6172 ­ Université de Limoges/CNRS, 123 avenue Albert Thomas, 87060 Limoges, France SPCTS UMR 6638 ­ Université de Limoges/CNRS, 123 avenue Albert Thomas,

Tunable Metamaterial Devices by means of Two-Hot-Arm Electrothermal Actuators A. X. Lalas, N. V. Kantartzis, T. V. Yioultsis, and T. D. Tsiboukis Department of Electrical and Computer Engineering, Aristotle University of Thessaloniki, GR-54124, Thessaloniki, Greece (E-mail: tsibukis-auth.gr) Abstract -- A reconfigurable metamaterial, obtained from the combination of two-hot-arm electrothermal actu

Design of selectable-band patch filter for WiMax applications using MEMS varactor G. Rehder1, A. L. C. Serrano1, F. S. Correra1 and M. N. P. Carreño1 1 Laboratory of Microelectronics, University of São Paulo, CP 61548, CEP 05424-970, São Paulo, SP, Brazil e-mail: grehder-lme.usp.br circular patch filter to change its center frequency and bandwidth. The face-to-face configuration was required to c

Optimization of a High-Power Ka-Band RF MEMS 2-Bit Phase Shifter on Sapphire Substrate B. Espana#1, B. Belenger#2 , S. Courrèges*, P. Blondy*, O. Vendier#, D. Langrez#, J.-L. Cazaux# # Thales Alenia Space,26 av JF Champollion, 31037 Toulouse Cedex1, France 1 2 beatrice.espana-thalesaleniaspace.com benoit.belenger-thalesaleniaspace.com * XLIM, UMR CNRS n°6672, Université de Limoges, 123 av A. T

Low-Loss Distributed 2-bit RF MEMS Phase Shifter for 60GHz Applications Cheikh Ndiaye1, Arnaud Pothier1, Cyril Guines1, Pierre Blondy1 1 XLIM UMR 6172, Université de Limoges /CNRS, 123 avenue Albert Thomas, 87060 Limoges, FRANCE cheikh-tidiane.ndiaye-xlim.fr arnaud.pothier-xlim.fr pierre.blondy-xlim.fr Abstract-- This paper presents the design of a low loss 2-bit digital phase shifter using a hi