Microwave MEMS devices designed for process robustness and operational reliability
Mikael Sterner, Nutapong Somjit, Umer Shah, Sergey Dudorov, Dmitry Chicherin, Antti Räisänen, Joachim Oberhammer
This paper presents an overview on novel microwave micro-electromechanical systems (MEMS) device concepts developed in our research group during the last 5 years, which are specifically designed for addressing some fundamental problems for reliable device operation and robustness to process parameter variation. In contrast to conventional solutions, the presented device concepts are targeted at el