The low-complexity RF MEMS switch at EADS: an overview
Bernhard Schoenlinner, Armin Stehle, Christian Siegel, William Gautier, Benedikt Schulte, Sascha Figur, Ulrich Prechtel, Volker Ziegler
This paper gives an overview of the low-complexity radio frequency microelectromechanical systems (RF MEMS) switch concept and technology of EADS Innovation Works in Germany. Starting in 2003, a capacitive switch concept, which is unique in several aspects, was developed to address specific needs in the aeronautic and space. Thermally grown silicon oxide as dielectric layer, the silicon substrate