Design and characterization of an active recovering mechanism for high-performance RF MEMS redundancy switches
Francesco Solazzi, Augusto Tazzoli, Paola Farinelli, Alessandro Faes, Viviana Mulloni, Benno Margesin, Gaudenzio Meneghesso
This paper presents the design and characterization of an active push/pull toggle RF micro-electro-mechanical systems (MEMS) switch for satellite redundancy networks. The actively controlled pull-up mechanism allows for extended restoring capabilities of the switch in case of ON-state stiction. As a proof of concept an active push/pull MEMS capacitive switch was modeled, designed, and manufactured