Experimental pressure sensing and technology of piezoelectric microwave/RF MEMS filters
Alessandro Massaro, Giuseppe Venanzoni, Marco Farina, Antonio Morini, Tullio Rozzi, Roberto Cingolani, Adriana Passaseo, Massimo De Vittorio
In this work, we analyze the pressure sensing of a thin film molybdenum/aluminumnitride/molybdenum (Mo/AlN/Mo) microwave/RF MEMS filter fabricated by a simple technology. After an experimental characterization in a frequency range between 1 and 36 GHz, we focused on the piezoelectric effect due to the stress properties of the piezoelectric AlN layer by applying forces by means of weights. Variatio