EuMIC: Microstrip Thin-Film MCM-D Technology on High-Resistivity Silicon with Integrated Through-Substrate Vias
G. Posada, G. Carchon, P. Soussan, N. Pham, B. Majeed, D. Sabuncouglu, W. Ruythooren, B. Nauwelaers, W. De Raedt
Proceedings of the 2nd European Microwave Integrated Circuits Conference
Microstrip Thin-Film MCM-D Technology on High-Resistivity Silicon with Integrated Through-Substrate Vias
G. Posada(1,2), G. Carchon(1), P. Soussan(1), N. Pham(1), B. Majeed(1), D. Sabuncouglu(1), W. Ruythooren(1), B. Nauwelaers(2), W. De Raedt(1) (1) IMEC, Div. MCP, Kapeldreef 75, B-3001 Heverlee, Belgium. (2) K.U.Leuven, Di