Mmwave Performance of InAlAs/InGaAs HEMTs using UVIII/PMMA Bilayer for T-Gate fabrication
Fets
Millimetre-wave Performance of InAlAs/InGaAs HEMTs using a UVIII/PMMA Bilayer for 70nm T-Gate fabrication
David L.Edgar*, Yifang Chen, Fiona McEwan, Helen McLelland, Euan Boyd, David Moran, Stephen Thoms, Douglas Macintyre, Khaled Elgaid, Xin Cao, Colin Stanley, Iain Thayne
Nanoelectronics Research Centre, Dept of Electronics and Electrical Engineering, University of Glasgow, Glasgow G12 8LT, Sco