Packaged Millimeter Wave Thermal MEMS Switches
P. Blondy, D. Mercier, D. Cros, P. Guillon, P. Rey, P. Charvet, B. Diem, C. Zanchi, L. Lapierre, J. Sombrin, J.B. Quoirin
Packaged Millimeter Wave Thermal MEMS Switches
P. Blondy*,D. Mercier*, D. Cros*, P. Guillon* P. Rey**, P. Charvet**, B. Diem** C. Zanchi***, L. Lapierre***, J. Sombrin***, J.B. Quoirin**** Tel: 05 55 45 77 31 Fax: 05 55 45 76 49 email: pblondy-ircom.unilim.fr * IRCOM, Faculté des Sciences, 123 avenue A. Thomas, 87000 LIMOGES FRANCE ** CEA-LETI, 17 rue des Martyrs, 38054 GRENOBLE Cedex 9 *** CN