EuMIC: CMOS Gate Spacer Process Optimisation to Boost SOI Device RF/mmWave Performance
Y. Zhang-Fu, T. Mota-Frutuoso, L. Lucci, B. Mohamad, L. Nyssens, M. Dartois, M. Ribotta, V. Lapras, K. Romanjek, Jean-Pierre Raskin, C. Fenouillet-Beranger
Proceedings of the 21st European Microwave Integrated Circuits Conference
CMOS Gate Spacer Process Optimisation
to Boost SOI Device RF/mmWave Performance
Y. Zhang-Fu#$ , T. Mota-Frutuoso# , L. Lucci# , B. Mohamad# , L. Nyssens# , M. Dartois# , M. Ribotta# ,
V. Lapras# , K. Romanjek# , J.-P. Raskin#$ , C. Fenouillet-Beranger#
# Univ.
Grenoble Alpes, CEA, Leti, France
? Université catholique de Lo