MICROWAVE HEATING FOR VLSI PROCESSING R. Buchta, G. Boling, F. Sellberg, D. Sigurd" ABSTRACT Rapid Thermal Processing (RTP) will be necessary to meet the limited temperature budget in submicron VLSI manufacturing. In this paper we present a reactor concept for LPCVD and other thermal processes, utilizing microwave energy to heat silicon wafers to the required temperature. The reactor, in the form

RESEARCH AND NEW DEVELOPMENTS IN MICROWAVE COMMUNICATIONS FINLAND Veli A Santomaa* IN ABSTRACT Finland has long traditions in microwave technology and techniques. The first development work was a 8 channel radiolink for 7 GHz in 1948. After that many radars, radiolinks, radiometers, radio astronomy receivers, satellite receivers and antennas have been developed. This paper will cover the recent

MOBILE COMMUNICATIONSIN THE UNITED STATES David J. Goodman Rutgers University WINLAB Box 909 Piscataway, NJ, 08855-0909, USA + 1-908-932-5261 (phone) + 1-908-932-3693 dgoodman-winlab.rutgers.edu Abstract Public enthusiasm for cellular and cordless telephones has stimulated widespread interest in new mobile services. However, the outlook for the future is clouded by technical and regulatory uncerta

An Improved MESFETs Model Including Average Thermal Breakdown. Sub-threshold and Gate Diode ON Operation M. Joao Rosario.. Michel Gayral+. J. Costa Freire. Conditions. ABSTRACT A large signal model for MESFETs is presented. It uses the Curtice model for the intrinsic MESFET. in order to be compatible with existing CAD programs. To increase the accuracy for high level driving conditions. the oper

AUTOMATING THE MMIC DESIGN PROCESS USING EXPERr SYSfEMS M Brennan, VF Fusco, JAC Stewart ABSTRACT: An Automated Design Environment for MMIC design is presented. The architecture of the Environment based upon the use of expert systems is described and the methods by which different levels of design knowledge are presented to and addressed by the system are discussed. A detailed view of the progra

ELECTROMAGNETIC CHARACTERISATIONAND MODELING OF STRIPLINE STRUCTURES WITH SLOTIED AND MESHED GROUND PLANES B. Cabon, N. Corrao, J. Chilo IEEE Member ABSTRACT: Analyses of the effects of a holed ground plane on the signal line impedance are presented. Such patterns are very useful in advanced multichip packages since they allow high density interconnection networks. Variations in line impedanc

ACCURATE MODELLING OF LANGE COUPLERS FOR CAD APPLICATIONS G.G. Gentili -- I G. B. Stracca- I G. MacchiarellaG. Gatti' I M. Politi- and ABSTRACT An accurate modelling of MIC Lange coupler on micros trip sustrate has been developed. The model was implemented in a computer program named LANGECAD and the simulated results were compared with measured data of several devices. The agreement bet

COMPUTATIONALLY EFFICIENT MULTITONE OF NON-LINEAR MICROWAVE CIRCUITS F. Filicorio, V.A. Monaco!, G. Vanninil ANALYSIS Abstract. A new approach to the Harmonic-Balance analysis of non-linear microwave circuits driven by multitone excitations is proposed. It is based on the observation that in many practical cases of multitone analyses, signal spectra are characterized by a highly non uniform dist

THE CONJUGATE GRADIENT ME'mOD IN COMPARISON wmI THE EVOLUTION OPTIMIZATION FOR SOLVING NONLINEAR PROBLEMS Gerd Gottwald, Werner Wiesbeck. ABSTRACT The strategies for solving non-linear problems can be classtfted into two classes of deterministic and stochastic methods. One representative of each class, the Conjugate Gradient Method (CGM) and the Evolution Optimization (EVO), are compared with resp

A NEW UNIPLANAR DOUBLE BALANCED MIXER WITH HIGH PORT TO PORT ISOLATION V Trifunovic*. B Jokanovic* ABSTRACT A design of new uniplanar double balanced mixer with a high port to port isolation is presented. Through the use of novel CPW-slot double junction balun, the need for via holes and back metalization has been eliminated. Hence, this mixer can be easily adapted to monolithic integrated circuit