EuMIC: MOM Capacitance Characterization in G-Band Using On-Wafer 3D-TRL Calibration
A.A. Saadi, M. Margalef, S. Le Pilliet, C. Gaquiere, D. Gloria, C. Durand, Philippe Ferrari
Proceedings of the 14th European Microwave Integrated Circuits Conference
MOM Capacitance Characterization in G-Band using
On-wafer 3D-TRL Calibration
A.A. Saadi1,2, M. Margalef1,2, S. Le Pilliet3, C. Gaquière3, D. Gloria4, C. Durand4, and P. Ferrari1,2
1
Univ. Grenoble Alpes, CNRS, Grenoble INP*, RFIC-Lab, 38000 Grenoble, France
2
Institute of Engineering Univ. Grenoble Alpes
3
IEMN Université