Millimeter-wave hetero-integrated sources in InP-on-BiCMOS technology
Thomas Jensen, Thualfiqar Al-Sawaf, Marco Lisker, Srdjan Glisic, Mohamed Elkhouly, Tomas Kraemer, Ina Ostermay, Chafik Meliani, Bernd Tillack, Viktor Krozer, Olaf Krueger, Wolfgang Heinrich
The paper presents millimeter-wave (mm-wave) signal sources using a hetero-integrated InP-on-BiCMOS semiconductor technology. Mm-wave signal sources feature fundamental frequency voltage-controlled oscillators (VCOs) in BiCMOS, which drive frequency multiplier?amplifier chains in transferred-substrate (TS) InP-DHBT technology, heterogeneously integrated on top of the BiCMOS wafer in a wafer-level