EuMIC: Reliability of Nanocrystalline Diamond MEMS Capacitive Switches
L. Michalas, S. Saada, M. Koutsoureli, C. Mer, A. Leuliet, P. Martins, S. Bansropun, G. Papaioannou, P. Bergonzo, A. Ziaei
Proceedings of the 8th European Microwave Integrated Circuits Conference
Reliability of Nanocrystalline Diamond MEMS Capacitive Switches
L. Michalas1,a, S.Saada2,b, M. Koutsoureli1, C. Mer2, A. Leuliet3,c, P. Martins3, S. Bansropun3, G. Papaioannou1, P. Bergonzo2, A. Ziaei3
1
Solid State Section, Physics Department University of Athens, Athens, Greece a lmichal-phys.uoa.gr
2
Diamond Sensors Lab