RF-MEMS chip capping by dry film epoxy polymer
Flavio Giacomozzi, Sabrina Colpo, Alessandro Faes , Guido Sordo, Stefano Girardi, Paola Farinelli
RF-MEMS chip capping by dry film epoxy polymer
Flavio Giacomozzi1, Sabrina Colpo1, Alessandro Faes1 , Guido Sordo1, Stefano Girardi1, Paola Farinelli2
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Fondazione Bruno Kessler (FBK), MEMS group, Trento, Italy University of Perugia, Dept. of Electronic and Information Engineering, Via G. Duranti, 93 - I-06125 Perugia Italy
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Abstract -- This work reports on RF MEMS chip capping to protect se