Mechanical Nano gap Switch for Low Power On-board Electronics Achref Yahiaoui, Emilien lemoine, Arnaud Pothier, Pierre Blondy XLIM UMR 6172 ­ Université de Limoges/CNRS, 123 Avenue Albert Thomas, 87060 Limoges France Abstract-- This paper presents the design and measurement of a Nano gap RF MEMS (Micro-Electro-Mechanical System) metalcontact switch. The main idea is, to reach relatively high cont

An Accurate Equivalent Circuit Model for RFMEMS Circuit Optimization and Fabrication Process Monitoring in BiCMOS Technology N. Torres Matabosch1,2, F. Coccetti1,2, M. Kaynak3, W. Zhang3, B. Tillack3 and J. L. Cazaux4 CNRS, LAAS, 7 Avenue Colonel Roche, F-31077 Toulouse, FRANCE 2 Univ de Toulouse ; UPS, LAAS F-31077 Toulouse, FRANCE 3 IHP, Im Technologiepark 25, 15236 Frankfurt (Oder), Germany 4 T

Surface Micromachining Implementation of S-Band 4-bit Phase Shifter Korkut Kaan Tokgöz1, imek Demir1, Tayfun Akin1.2 1 Dept. Electrical and Electronics Eng. Middle East Technical Univ., Ankara, Turkey, ktokgoz-metu.edu.tr, simsek-metu.edu.tr 2 METU-MEMS Research Center, Ankara, Turkey, tayfun-akin-metu.edu.tr [4]. Switched all-pass filter network is one of these topologies with several advantages

The Influence of High Temperature Stress on a BiCMOS Embedded RF-MEMS Switch M. Wietstruck1, M. Kaynak1, W. Zhang1, K. Kaletta2 and B. Tillack1,3 IHP, Im Technologiepark 25, 15236 Frankfurt (Oder), Germany Tel: (+49) 3355625 609, Email: wietstruck-ihp-microelectronics.com 2 Fraunhofer IZM, Gustav-Meyer-Allee 25, 13355 Berlin, Germany 3 Technische Universität Berlin, HFT4, Einsteinufer 25, 10587 Be

Electrical Properties of AlN Dielectric Films for MEMS Capacitive Switches M. Koutsoureli1, A. Adikimenakis2, L. Michalas1, A. Pantazis2, G. Konstantinidis2, A. Georgakilas2 and G. Papaioannou1 1 Solid State Physics Section, University of Athens, GR-15784, Athens, Greece 2 IESL ­FORTH, GR-71110, Heraklion, Greece (E-mail: mkoutsoureli-phys.uoa.gr) Abstract ­ The present work investigates the el

A Q-Band RF-MEMS Absorptive SPST in a BiCMOS Technology Mehmet Kaynak1, Wogong Zhang1, Matthias Wietstruck1 and Bernd Tillack1,2 IHP, Im Technologiepark 25, 15236 Frankfurt (Oder), Germany 2 Technische Universität Berlin, Berlin, Germany Tel: (+49) 335 5625 707, Fax: (+49) 335 5625 327, Email: kaynak-ihp-microelectronics.com H H H H 1 Abstract -- This paper presents a Q-band absorptive SPST (Sin

High Linearity 2.6 - 3 GHz Switchable Combline Filter in MEMS-Loaded Substrate Integrated Waveguide S. Sirci , J.D. Mart´nez , R. Stefanini , M. Taroncher, P. Blondy , V.E. Boria i Universitat Polit` cnica de Val` ncia, Camino de Vera s/n, 46022, Valencia (Spain) e e AirMeMs, Limoges (France) XLIM, UMR n 6172, Universit´ de Limoges - CNRS, Limoges (France) e Abstract--In this work, a tunable

A 5-Bit DMTL Phase Shifter with Analog Tuning Capabilities Ca ri Cetintepe , Kaan Demirel , Simsek Demir , Tayfun Akin ¸ g ¸ ¸ ¸ § Department of Electrical and Electronics Engineering Middle East Technical University, Ankara Email: ccagri-metu.edu.tr, kaand-metu.edu.tr, simsek-metu.edu.tr, § tayfun-akin-metu.edu.tr coverage and 11.25 phase increment specifications at a particular operating

1-bit MEMS-based Reconfigurable Unit-Cell for Transmit-Array Antennas at X-Band Frequencies Antonio Clemente1, Laurent Dussopt1, Bruno Reig1, Ronan Sauleau2, Patrick Potier3, Philippe Pouliguen4 1 CEA LETI, Minatec Campus, 17 rue des Martyrs, 38054 Grenoble, France, antonio.clemente-cea.fr 2 IETR, UMR CNRS 6164, Université Rennes 1, 35042 Rennes, France 3 DGA/Maîtrise de l'information, La roche m

Reconfigurable Millimeter-Wave ICs in an RFMEMS Embedded BiCMOS Technology A. Çari Ulusoy1, Mehmet Kaynak2, Gang Liu1, Tatyana Purtova1, Bernd Tillack2,3, and Hermann Schumacher1 2 Institute of Electron Devices and Circuits, Ulm University, Ulm, Germany. (ahmet.ulusoy-uni-ulm.de) IHP, Im Technologiepark 25, D-15236 Frankfurt (Oder), Germany . (kaynak-ihp-microelectronics.com) 3 Technische Univers