Gas and humidity sensors based on high frequency acoustic devices manufactured on GaN/Si
A. Cismaru , G. Konstantinidis , K. Szacilowski , A. Müller , A. Stefanescu , A. Stavrinidis , K. Tsagaraki , T. Kostopulos , D. Neculoiu , G. Stavrinidis , C. Buiculescu and P. Kwolek
Gas and humidity sensors based on high frequency acoustic devices manufactured on GaN/Si
A. Cismaru1, G. Konstantinidis2, K. Szacilowski3,4, A. Müller1, A. Stefanescu1, A. Stavrinidis2, K. Tsagaraki2, T. Kostopulos2, D. Neculoiu1, G. Stavrinidis1, C. Buiculescu1 and P. Kwolek3
1
IMT Bucharest, 32B, Erou Iancu Nicolae str., 077190 Bucharest, Romania
2 3 4
FORTH-IESL-MRG Heraklion, PO Box 1527, Cr