A High-Q MEMS-Tunable Cavity in K-band Luca Pelliccia(1), Fabrizio Cacciamani(1), Paola Farinelli(2), Per Ligander(3), Ove Persson(3), Roberto Sorrentino(1) (1) DIEI, University of Perugia, Perugia, Italy, +39 075 585 3661 (2) RF-Microtech S.r.l., Perugia, Italy, +39 075 52 71 436 (3) Ericsson AB, Mölndal, Sweden, +46 10 712 0315 Abstract -- The experimental results of an innovative MEMS-tunable

Basic Concept of Tuneable MEMS Directional Couplers for Ultra-Wideband Applications Umer Shah, Mikael Sterner, and Joachim Oberhammer Microsystem Technology Lab, KTH Royal Institute of Technology, Stockholm, Sweden Abstract -- This paper reports on area-efficient, ultrawideband, MEMS-reconfigurable directional couplers, whose coupling is tuned by mechanically changing the geometry of 3D-micromachi

Characterization of high-resolution millimeter-wave measurement probe for skin tissue analysis Fritzi Töpfer, Sergey Dudorov, Joachim Oberhammer KTH Royal Institute of Technology, Microsystem Technology Lab, Osquldas väg 10, SE-10044 Stockholm, Sweden, Email: fritzi-kth.se Abstract -- This paper reports on a novel micromachined millimeter-wave near-field measurement probe for skin-cancer diagnosis

New Methodology for Process Design Kit (PDK) of BiCMOS compatible RF MEMS A. Mehdaoui1, G. Schröpfer1, G. Lorenz1, M. Kaynak2, M. Wietstruck2 1 COVENTOR Sarl, 3 avenue du Quebec Z-I de Courtaboeuf, 91140 Villebon sur Yvette, France 2 IHP, Im Technologiepark 25, 15236 Frankfurt (Oder), Germany Abstract -- This work reports on a new methodology for designing RF MEMS devices and simulating them to

Low-Voltage Capacitive and Ohmic RF-MEMS Switches Adrián Contreras1, Jasmina Casals-Terré 2, Lluís Pradell1, Flavio Giacomozzi3, Sabrina Colpo3, Jacopo Iannacci3, Miquel Ribó4 1 Signal Theory and Communications Department, Technical University of Catalonia (UPC), Barcelona, Spain 2 Mechanical Engineering Department, Technical University of Catalonia (UPC), Barcelona, Spain 3 MEMS group, Fondazion

Miniature MEMS Switch for Reconfigurable Terahertz Metamaterials Mehmet Unlu1 and Shenglin Li1 University of Michigan, Department of Electrical Engineering and Computer Science, 1301 Beal Ave, Ann Arbor, Michigan 48109, USA, +1-734-764-4474 Abstract -- This paper presents a miniature MEMS switch design for realizing reconfigurable terahertz metamaterials. The switch is designed and optimized to h

RF MEMS Bandwidth-Reconfigurable Hairpin Filters Fabrizio Gentili1, Luca Pelliccia1, Roberto Sorrentino1, Paola Farinelli2 1 University of Perugia, DIEI, Via G. Duranti 93, 06125 Perugia, Italy, +39 075 585 3661 2 RF Microtech s.r.l., Via P. Mascagni 11, 06132 Perugia, Italy, + 39 075 5271436 Abstract -- A new approach to bandwidth-reconfigurable planar filter is proposed. RF MEMS switches are u

A Series Power Divider using Zero-Degree Metamaterial Lines with MEMS Tuning Capability Kagan Topalli1 and Evren Ekmekci2 2 Dept. of Electrical-Electronics Eng., TED University, 06440, Ankara, Turkey, +90 312 418 4147 Dept. of Electronics and Communication, Suleyman Demirel University, 32260, Isparta, Turkey, +90 246 211 1380 This paper presents a frequency tunable series power divider consisting

DC-50GHz RF-MEMS SPDT switch for High Reliability applications N.Torres Matabosch1,2, F.Coccetti1,2, B.Reig3,C.Dieppedale3, H.Sibuet3, C.Billard3, F.Deborgies4 and J.L.Cazaux5, CNRS, LAAS, 7 Avenue Colonel Roche, F-31077 Toulouse, FRANCE 2 Univ de Toulouse ; UPS, LAAS F-31077 Toulouse, FRANCE 3 CEA, LETI, MINATEC, F-38054 Grenoble, FRANCE 4 ESA-ESTEC; Keeperlaan 1, Postbus 299 2200-AG Noordwijk, T

Low Sensitivity to Stress and Low-Voltage RF MEMS Switched Capacitors Romain Stefanini#, Cyril Guines*, Fabien Barriere*, Emilien Lemoine*, Pierre Blondy#,* # AirMems ­ Rue Atlantis, Site Ester Technopole, 87069 Limoges ­FRANCE*XLIM ­UMR n°6172- Université de Limoges/CNRS, 123, rue Albert Thomas, 87060 Limoges Cedex ­FRANCE- Abstract--A new topology of high power handling RF MEMS switched capaci