MEMS Resonators for Frequency Control and Sensing Applications Prof. Gianluca ("Gian") Piazza Penn Micro and Nano Systems Laboratory (PMaNS Lab) Department of Electrical and Systems Engineering University of Pennsylvania Philadelphia, PA 19104, USA piazza-seas.upenn.edu P: 215-5732812 http://pmans.ese.upenn.edu/ Outline · Overview of MEMS Resonators, RF Applications and Products · MEMS Resonator

DIPARTIMENTO DI MECCANICA POLITECNICO DI TORINO RF MEMS : Electro-Mechanical Modeling and experimental identification Prof. Aurelio Somà 6th International Summer School on RF-MEMS and RF Microsystems 21-25 June 2010 - University of Padova Italy Laboratory for the Design and the Characterization of Microsystems Index of contents OUTLINE Design and modeling of RF MEMS ­ Layouts: microcantile

MICROSYSTEMS INTEGRATION FOR RF APPPLICATIONS Ignazio Pomona ­ Hardware Competence Center g ee g ect o Engineering Direction SELEX COMMUNICATIONS 6th International Summer School on RF-MEMS and RF Microsystems 21 June 2010 ­ University of Padova ­ DEI - Italy © Copyright SELEX Communications. All rights reserved. CONTENT SELEX COMMUNICATIONS SATCOM SOLUTIONS SYSTEM APPLICATIONS OVERVIEW MICROSY

6th International Summer School on RFMEMS and RF 6th International Summer School on RFMEMS and RFMicrosystems 21 25 June 2010 University of Padova DEI 21 25 June 2010 University of Padova DEI Italy 6th International Summer School on RFRF-MEMS and RF Microsystems Welcome W l Department of I f D t t f Information E i ti Enginnering i University of Padova 21 - 25 June 2010 6th Internati

Micromachined Cavity Resonator on MCM-D with Shielded Coplanar Waveguide Feed for Automotive RADAR applications Ilja Ocket1,2, Harrie Tilmans1, Dragos Dancila1,3, Walter De Raedt1, Bart Nauwelaers2 and I. Huynen3 1 Interuniversity Micro-electronics Centre (IMEC), Kapeldreef 75, 3001 Leuven (Heverlee), Belgium 2 ESAT-TELEMIC, K.U.Leuven, Kasteelpark Arenberg 10, 3001 Leuven (Heverlee), Belgium 2 3

200 GHz Receiver with Double Folded Slot Antennas Fabricated on Thin GaAs Membrane Dan Neculoiu, Dan Vasilache, Alexandra Stefanescu, Alexandru Muller, Dan Dascalu IMT-Bucharest, Romania dan.neculoiu-imt.ro George Stavrinidis, George Konstantinidis, Antonis Stavinidris, Zacharias Chatzopoulos FORTH-IESL-MRG Heraklion, Crete, Greece Tauno Vaha-Heikkila, Pekka Pursula, Ilkka Marttila VTT Technical

An X-Band reconfigurable RF MEMS reflect-line phase-shifter Vincenzo Schirosi, Giampiero Del Re, Luca Ferrari, Pierangela Caliandro, Leonardo Rizzi, Giovanni Melone OPTEL InP Consortium Microelectronic Research Lab c/o Cittadella della Ricerca, S.S. 7 Km 7.3, 72100 Brindisi - ITALY v.schirosi-optel.it, l.rizzi-optel.it Abstract - RF MEMS technology allows fabrication of very interesting devices f

Design and Integration of a Low Phase Noise Voltage Controlled Oscillator with MEMS Based Varactor Ashesh Ray Chaudhuri Advanced Technology Development Centre Indian Institute of Technology, Kharagpur Kharagpur, India asheshraychaudhuri-gmail.com Subha Chakraborty Electronics and Electrical Communication Engineering Indian Institute of Technology, Kharagpur Kharagpur, India subharpe-gmail.com A.

MEMS Resonator frequency compensation by « in-line » trimming Yoan Civet, Skandar Basrour TIMA (CNRS-Grenoble INP-UJF) ­ UMR 5159 46 Av. Félix Viallet 38031 Grenoble, France yoan.civet-imag.fr Fabrice Casset, Sébastien Decossas, Thibault Haccart CEA, LETI, MINATEC F38054 Grenoble, France Jean-François Carpentier ST Microelectronics 850 rue Jean Monnet 38926 Crolles, France Abstract--In this pap

Miniature RF MEMS Switches with 50 ns Switching Speed Aurélie Verger, Arnaud Pothier, Cyril Guines, Aurelian Crunteanu, Pierre Blondy XLIM UMR 6172 ­ Université de Limoges /CNRS 123, avenue Albert Thomas, 87060 Limoges, France Jean-Christophe Orlianges SPCTS UMR 6638 ­ Université de Limoges /CNRS 123, avenue Albert Thomas, 87060 Limoges, France Jérémie Dhennin NOVAMEMS 10, avenue de l'Europe, 31