IC integration-compatible single crystal silicon 100MHz MEMS resonators with 60nm air-gap and sub5V polarization voltage
E. Ollier, J. Arcamone, E. Lorent, E. Colinet, A. N iel, JF. Carpentier, P. Ancey A. Berthelot, C. Marcoux, P. Renaux, C. Vizioz, D. ST Microelectronics Renaud, S. Hentz, F. Casset, P. Robert Crolles
IC integration-compatible single crystal silicon 100MHz MEMS resonators with 60nm air-gap and sub5V polarization voltage
E. Ollier, J. Arcamone, E. Lorent, E. Colinet, A. Niel, A. Berthelot, C. Marcoux, P. Renaux, C. Vizioz, D. Renaud, S. Hentz, F. Casset, P. Robert
CEA-LETI/MINATEC Grenoble, France eric.ollier-cea.fr
JF. Carpentier, P. Ancey
ST Microelectronics Crolles, France :
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