Switchable/Tunable FBARs: Current status and potential Spartak Gevorgian and Andrei Vorobiev Chalmers University of Technology, Gothenburg Sweden I Introduction The Film Bulk Acoustic Wave Resonators (FBAR), especially AlN based, are one of the success stories of the recent years. Fig.1a shows the progress in FBARs in terms of Q-factor. A considerable understanding is achieved in the field, even

Successive Conduction Modes in Si3N4 Capacitive RF-MEMS David Mardivirin, Stanis Courrèges, Pierre Blondy XLIM UMR 6172 - Université de Limoges/CNRS 123 Avenue Albert Thomas - 87060 LIMOGES Cedex FRANCE david.mardivirin-xlim.fr Abstract-- This paper studies the activation voltages drifts due to charging in RF-MEMS based on Si3N4 dielectrics, deposited by PECVD. The switch is a 79 fF to 646 fF vara

1 Push-Pull Seesaw Principle Capacitive RF-MEMS Shunt Switch Jinyu J. Ruan #1 , Christina Villeneuve # , Fabio Coccetti # , Patrick Pons # , Nicolas Nolhier # , Robert Plana # # CNRS; # LAAS; 7 avenue du colonel, F-31077 Toulouse, France Universit´ de Toulouse; UPS, INSA, INP, ISAE; LAAS; F-31077 e 1 jruan-laas.fr Abstract-- In the frame of high reliability MEMS redundancy switch for space and

Topic: Materials and Device Characterization ELECTRICAL CHARACTERIZATION OF STANDARD AND ALTERNATIVE MATERIALS FOR RF MEMS SWITCHES IN III-V TECHNOLOGY A. Persano, F. Quaranta, M. C. Martucci, P. Cretì, P. Siciliano, and A. Cola IMM-CNR, Institute for Microelectronics and Microsystems-Unit of Lecce, Via Monteroni, I-73100 Lecce, Italy E-mail: anna.persano-le.imm.cnr.it Abstract RF MEMS represent

Topic: RF MEMS A novel manufacturing technology for RF MEMS devices on ceramic substrates Vincenzo Schirosi#1, Giampiero Del Re#2, Luca Ferrari#3, Pierangela Caliandro#4, Leonardo Rizzi#5, Giovanni Melone#6 #"Optel InP Consortium Microelectronic Research lab" Cittadella della Ricerca, S.S. 7 Km 7.300, I - 72100 Brindisi, ITALY Abstract Microelectromechanical systems are often used for their enor

A Millimeter-Wave Tunable Bandpass Filter Using BCB Cap Actuation Seonho Seok, Janggil Kim, Nathalie Rolland, and Paul-Alain Rolland IEMN/IRCICA CNRS 8520 Cité Scientifique-Avenue Poincare BP 60069 59652 Villeneuve d'Ascq Cedex, France Abstract -- This paper presents design, fabrication and characterization of 60 GHz-band tunable bandpass filter (BPF) obtained by the actuation of BCB thin-film cap

Design of mm-wave 5-bit phase shifters for Phased Array Antenna Systems Team CONFIRM [reCONFIrable circuits by Rf Mems] - FINMECCANICA CORPORATE PROJECT ADVANCED MATERIALS & ENABLING TECHNOLOGIES - MINDSH-RE COMMUNITY F. Casini#1, F. Di Maggio§2, M. Dispenza*3, P. Farinelli#4, B. Margesin%5, E. Carpentieri£6, U. D'Elia£7, R. Vitiello£8, I. Pomona§9, A. Tazzoli$10, G. Meneghesso$11, M. Tului[]12,

Two pages abstract Topic: ...... Reliability and Testing....... EXPERIMENTAL INVESTIGATION OF AN EMBEDDED HEATING MECHANISM TO IMPROVE RF-MEMS SWITCHES RELIABILITY Augusto Tazzoli*, Marco Barbato, Gaudenzio Meneghesso University of Padova, Department of Information Engineering, Via Gradenigo 6/b, 35100 Padova, Italy Alena Repchankova, Benno Margesin and Jacopo Iannacci Fondazione Bruno Kessler

Analysis of Power Capacity of RF MEMS Capacitive Shunt Switches Fabricated on Silicon or Quartz Substrates Cristiano Palego, Francesco Solazzi, Subrata Halder, and James C. M. Hwang Lehigh University, Bethlehem, PA 18015, USA Paola Farinelli, and Roberto Sorrentino RF Microtech, Perugia 06125, Italy Alessandro Faes, Viviana Mulloni, and Benno Margesin FBK-IRST, Trento 38050, Italy Abstract--Robust

Two pages abstract Topic: Materials and Device Characterization Fabrication and Packaging Technologies RELIABLE RF MICROSYSTEM TECHNOLOGIES FOR SPACE APPLICATIONS R. Marcelli*, E. Proietti, A. Lucibello, E. De Angelis, G. Bartolucci(§) CNR-IMM Roma, Italy (§) University of Roma "Tor Vergata", Dept. of Electronic Eng. F. Quaranta, C. Martucci, A. Persano CNR-IMM Lecce, Italy G. Mannocchi, S. Di