Ar Implantation, a Passivation Technique for High-Resistivity Silicon Within the MCM-D Technology
G. Posada, G. Carchon, P. Soussan, G. Poesen, Bart Nauwelaers, W. De Raedt
Proceedings of the 1st European Microwave Integrated Circuits Conference
Ar Implantation, a Passivation Technique for High-Resistivity Silicon within the MCM-D Technology
G. Posada(1), G. Carchon(1), P. Soussan(1), G.Poesen(1,3), B. Nauwelaers(2), W. De Raedt(1) (1) IMEC, Div. MCP, Kapeldreef 75, B-3001 Heverlee, Belgium. (2) K.U.Leuven, Div. ESAT-TELEMIC, Kadr. Mercierlaan 94, B-3001 Heverlee, B